Journal

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

ISSN 0734-2101 · American Institute of Physics

Published here

6 counted works of 6 linked

YearTitleAcademicsSources
2020 Area-selective atomic layer deposition enabled by competitive adsorption Robert A. DiStasio Jr. OA GS
1996 Extended operation of a wide-range, all magnetic bearing turbomolecular pump without backing Peter Weber CV OA
1993 Laser‐assisted nitridation of GaAs: Mechanisms Xiaoyang Zhu GS
1992 A high resolution electron energy loss spectroscopy study of trimethylgallium decomposition on gallium rich GaAs(100) Xiaoyang Zhu OA GS
1992 A novel source design for molecular beam machines. Peter Weber CV OA
1988 Scanning tunneling microscopy characterization of the geometric and electronic structure of hydrogen‐terminated silicon surfaces Michael Hecht GS